OSA Proceedings on Soft X-ray Projection Lithography Volume 12, proceedings of the Topical Meeting, April10-12, 1991, Monterey, California
- Författare
- Optical Society of America Jeffrey Bokor
- (Edited by Jeffrey Bokor sponsored by the Optical Society of America., "Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy")
- Genre
- Konferenspublikation, Konferenser, Ej skönlitteratur
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Optical Society of America | 1991 | USA, Washington, D.C | xii, 152 sidor illustrationer 29 cm | 978-1-55752-187-3 |